Axcelis Receives Order for Optima HD High Dose Ion Implanter

Process and Productivity Advantages Key Factors for New Customer Win


BEVERLY, Mass., Feb. 6, 2008 (PRIME NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced that it has received an order from a new customer for its single wafer Optima HD high dose implanter. The Optima HD is the industry's only implanter that addresses traditional high dose implants as well as an expanding range of applications that include molecular and hydrogen implants. The system will ship during the first quarter of 2008.

"This win signifies the seventh key customer that has selected the Optima HD for their fab," said Mary Puma, chairman and CEO of Axcelis. "We believe that winning new business even in a difficult market is a testament to the process and productivity advantages of the Optima HD. Its ability to perform conventional high dose implants along with advanced emerging technology requirements made the Optima HD the most logical choice. We expect this order to translate into capacity business when the market picks up."

The Optima HD is a single wafer high dose ion implanter capable of covering a broad range of implant applications. It is designed to deliver the highest real productivity with production drift mode beam currents, the fastest beam tuning performance and the most efficient scanning technology. The Optima HD's spot beam, combined with proprietary two-dimensional scanning architecture, eliminates the need for four-step implants. Precision dopant placement ensures that the entire wafer sees the same beam and the same beam angle -- achieving superior implant uniformity in just one cycle, or two scans through the beam.

Safe Harbor Statement

This document contains forward-looking statements under the SEC safe harbor provisions. These statements, which include our expectations for capacity orders, are based on management's current expectations and should be viewed with caution. They are subject to various risks and uncertainties, many of which are outside the control of the Company, including the timing of orders and shipments, the conversion of orders to revenue in any particular quarter, or at all, our ability to implement successfully our profit plans, the continuing demand for semiconductor equipment, relative market growth, continuity of business relationships with and purchases by major customers, competitive pressure on sales and pricing, increases in material and other production costs that cannot be recouped in product pricing and global economic, political and financial conditions. These risks and other risk factors relating to Axcelis are described more fully in the most recent Form 10-K filed by Axcelis and in other documents filed from time to time with the Securities and Exchange Commission.

About Axcelis Technologies, Inc.

Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life cycle support of ion implantation and cleaning systems. Axcelis also licenses its 50% owned joint venture, SEN Corporation, an SHI and Axcelis Company, to manufacture and sell certain implant products in Japan. The company's Internet address is: www.axcelis.com.



            

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