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July 19, 2011 08:01 ET | Source: Axcelis Technologies, Inc.

Axcelis Launches Revolutionary Ion Source Technology for High Current Implant: New Design Extends Source Life by 300-500%

BEVERLY, Mass., July 19, 2011 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today introduced the next generation Eterna ELS (Extended Life Source), the Eterna ELS3. It is designed to...