TABY, Sweden, Dec. 2, 2002 (PRIMEZONE) -- Micronic Laser Systems AB (Stockholm:MICR), a leading manufacturer of laser pattern generation equipment for the semiconductor and display industries, today introduced the Sigma7300, a laser pattern generator with resolution and pattern accuracy targeted for volume production at the 90 and 65 nm technology nodes. The tool offers cutting-edge resolution capable of writing photomasks for critical layers in short write times to reduce turnaround and lower the cost of masks.
"The Sigma7300 offers the resolution, pattern accuracy, fidelity and tuning capability to allow customers to write many of the critical layer masks that have traditionally been written with electron-beam pattern generators," said Jorge Freyer, Micronic's Sr. vice president for marketing and business development. "This tool vaults Micronic beyond the traditional laser pattern generator market and well into the e-beam segment."
The Sigma7300 works like a micro-stepper with a programmable mask. It is based on Micronic's exclusive spatial light modulator (SLM) technology. The SLM is an integrated circuit with a flat, mirror-like surface. Deep ultraviolet light is reflected off the surface of the SLM to expose photoresist on a photomask blank, forming the pattern of the mask.
The Sigma7300 features a new, modular platform with an ultra-clean environment and a standard mechanical interface (SMIF) material interface. The tool uses a 248 nm laser with 2 kHz flash rate and a 0.82 numerical aperture. The Sigma7300 employs many of the same resolution enhancement techniques that wafer steppers use in order to achieve maximum resolution and critical dimension control. A high-precision alignment system for writing the second layer of phase shift masks is also available.
Company contact: Agency contact: Ulf Sundstrom Dylan McGrath Sr. Vice President, Customer Operation The Loomis Group, Inc. Tel: +46 8 638 52 00 Tel: +1 415 882 9494 ulf.sundstrom@micronic.se dylan@loomisgroup.com
About Micronic Laser Systems AB
Micronic Laser Systems is a Swedish high-tech company engaged in the development, manufacture and marketing of a series of extremely accurate laser pattern generators for the production of photomasks. The technology involved is known as microlithography. Micronic's systems are used by the world's leading electronics companies in the manufacture of television and computer displays, semiconductor circuits and semiconductor packaging components. Micronic is located in Taby, north of Stockholm and at present has subsidiaries in the United States, Japan and Taiwan. Micronic maintains a web site at: http://www.micronic.se
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