BEVERLY, Mass., Nov. 30, 2009 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced the introduction of the Optima HDx high dose implanter, which brings unprecedented beam current and performance levels to the high dose space. An extension of the company's Optima HD platform, the Optima HDx has been designed to provide chipmakers dramatically increased productivity and capital efficiency. The system is the latest tool in Axcelis' versatile Optima implant family, and is available now for shipment.
"In today's competitive environment, semiconductor manufacturers are simultaneously challenged with increasing fab productivity, reducing costs as well as meeting the requirements of next generation device manufacturing," said Bill Bintz, senior vice president of marketing. "The new Optima HDx was expressly designed to meet these challenges. We've worked closely with customers over the downturn and the results speak for themselves. The new Optima HDx provides customers the advanced process capabilities required for emerging new device architectures, while setting a new standard for high dose productivity."
The new Optima HDx features a unique combination of enhancements to maximize beam current, minimize beam set up time and eradicate energy contamination to deliver the most precise and repeatable performance in the high dose space. The system's unique spot beam technology and short beamline deliver the industry's highest drift beam currents up to 36mA, or 38%, higher than its competitors. To further enhance performance, its patented AutoTune beam tuning system has significantly accelerated both tune times and success rates, providing up to a 60% advantage over competitive systems, for increased fab productivity. Key to the systems enabling technology is the proprietary RadiusScan, which ensures the best across-wafer dose and angle process uniformity, as well as repeatability.
Learn more about the Optima HDx and Axcelis' other ion implant and cleaning products at the upcoming SEMICON Japan, on December 2-4th, at the Makuhari Messe in Chiba, Japan. Visit booth #2B-401.
About Axcelis
Axcelis Technologies, Inc. (Nasdaq:ACLS), headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.