BILTHOVEN, The Netherlands (Dec. 16, 2002) - ASM International N.V. (NASDAQ: ASMI and Euronext Amsterdam: ASM) and its subsidiary, ASM Japan, announced today its Dragon[TM] 2300 PECVD tool is now ready for high-volume manufacturing (HVM). The Dragon has the smallest footprint of any PECVD tool for HVM.
ASM's compact Dragon 300mm PECVD tool demonstrates high wafer throughput and highest uptime. High throughput is achieved with the Dragon's symmetric process on dual reactors, while the independent process control remains at each reactor to achieve the best process performance. In addition, the unique modules concept allows for ease of maintenance and higher uptime.
The Dragon's small footprint allows for easier design into 300mm fab layouts. With a simplified design, the Dragon enables short lead time for manufacturing and installation. Furthermore, the Dragon maintains low energy consumption and lowest CoO performance.
"ASM's Dragon tool addresses the critical factors of importance to customers in 300mm wafer processing," said Tominori Yoshida, ASM's business unit manager for PECVD and low-k. "With the Dragon ready for high-volume manufacturing, ASM is further positioned as a leader in PECVD."
"ASM's progress in PECVD demonstrates our unique leadership in providing customers with the most advanced technology solutions to meet their next-generation chip manufacturing requirements," said Daniel Queyssac, president and COO of ASM Front-End Operations. "Our dedication to establishing ground-breaking processes and products that serve the needs of 300mm wafer processing customers reinforces our commitment to the process of innovation."
Process applications for the Dragon 2300 include conventional TEOS, Silane based process and SiC hardmask and low-k films including Aurora[TM] 2.7 and Aurora[TM] 2.4.
About ASM
ASM International N.V. is headquartered in Bilthoven, the Netherlands. ASM International is a global company, serving one of the most important and demanding industries in the world. The Company possesses a strong technological base, state-of-the-art manufacturing facilities, a competent and qualified workforce and a highly trained, strategically distributed support network. ASM International's subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing, assembly and packaging through their facilities in the United States, Europe, Japan and Asia. ASM International's common stock shares trade on NASDAQ (symbol ASMI) and the Euronext Stock Exchange in Amsterdam (symbol ASM). For more information, visit ASM's Web site at http://www.asm.com
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Safe Harbor Statement under the US Private Securities Litigation Reform Act of 1995: The statements regarding orders, earnings development and the effects of research and new products on ASM's future, and other matters discussed in this statement, except for any historical data, are forward-looking statements. Forward-looking statements involve risks and uncertainties that could cause actual results to differ materially from those in the forward-looking statements. These include, but are not limited to economic conditions in the semiconductor industry, currency fluctuations, the timing of significant orders, market acceptance of new products, competitive factors, risk factors related to litigation and other risks indicated in filings from time to time with the SEC and Stock Exchange Authorities.
ASM is a registered trademark [TM], and Dragon and Aurora are trademarks [TM] of ASM International.
