TABY, Sweden, April 8, 2003 (PRIMEZONE) -- Micronic Laser Systems AB (Other OTC:MICLF) (OM Stockholm Exchange:MICR), a leading manufacturer of laser pattern generation equipment for the semiconductor and display industries, today introduced a volume production TFT-LCD photomask pattern generator. The LRS11000-TFT3 offers the sub-micron resolution needed to produce advanced gray tone photomasks, as well as those used for large area, low temperature poly silicon (LTPS) TFT-LCDs.
"Large LTPS displays can be made without stitching small masks together using photomasks from the LRS11000-TFT3, greatly enhancing the manufacturing productivity," said Jorge Freyer, senior vice president for marketing & business development of Micronic. "With twice the resolution capability of Micronic's previous generation TFT photomask writing tool, the LRS11000-TFT3 enables our customers to meet the requirements of state of the art TFT photomasks."
The LRS11000-TFT3 has a maximum resolution of 0.75 micron. Other key features of the LRS11000-TFT3 include a real-time datapath with higher capacity to match the increased pattern density that is a result of the higher resolution; improved linewidth control and pattern registration better than 120 nm. The tool also offers extended multi-beam functionality to maintain high throughput.
About Micronic Laser Systems AB
Micronic Laser Systems is a Swedish high-tech company engaged in the development, manufacture and marketing of a series of extremely accurate laser pattern generators for the production of photomasks. The technology involved is known as microlithography. Micronic's systems are used by the world's leading electronics companies in the manufacture of television and computer displays, semiconductor circuits and semiconductor packaging components. Micronic is located in Taby, north of Stockholm and at present has subsidiaries in the United States, Japan and Taiwan. Micronic maintains a web site at: http://www.micronic.se
Company contact: Agency contact: Ulf Sundstrom Dylan McGrath Sr. Vice President, Customer Operation The Loomis Group, Inc. Tel: +46 8 638 52 00 Tel: +1 415 882 9494 ulf.sundstrom@micronic.se dylan@loomisgroup.com
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