BEVERLY, Mass., June 28, 2010 (GLOBE NEWSWIRE) -- Axcelis Technologies, Inc. (Nasdaq:ACLS) today announced the introduction of the Optima XEx high energy implanter, which provides chipmakers the highest levels of productivity at the lowest total cost across the entire range of high energy applications. The company has already shipped several systems to customers in both Asia and Europe, and received a multiple system, follow-on order from one of the world's largest chipmakers.
"Axcelis is the industry leader in high energy ion implantation, with the world's most advanced technology, the largest installed base and leading market share. Our expertise in this space gives us unique insight into customer requirements," said Bill Bintz, senior vice president of marketing. "Innovative enhancements made to the beamline and wafer handling offer customers a powerful and versatile solution that delivers optimized precision, increased capital efficiency and extendibility for future technology nodes. Customers using the Optima XEx are extremely pleased by the compelling combination of advantages it provides in high volume, leading edge device manufacturing."
An extension of the company's successful Optima XE platform, the new Optima XEx combines Axcelis' industry benchmark RF LINAC accelerator with a 500 WPH high-speed endstation, and the highest usable beam currents to deliver a two-fold productivity advantage over the competition. Its vast energy range of 40keV to 4.5MeV offers remarkable flexibility allowing a single tool to support chipmakers' dynamic high energy requirements for DRAM, NAND and NOR FLASH, embedded memory, image sensor and logic device manufacturing. The system is ideally suited for both high volume manufacturing and advanced process development for 22nm and beyond, by employing precision implant and dose control technologies. For each and every implant, the results are precise, uniform and at the highest possible throughputs, resulting in the industry's highest productivity and lowest total cost.
About Axcelis
Axcelis Technologies, Inc. (Nasdaq:ACLS) headquartered in Beverly, Massachusetts, provides innovative, high-productivity solutions for the semiconductor industry. Axcelis is dedicated to developing enabling process applications through the design, manufacture and complete life support of ion implantation and cleaning systems. The company's Internet address is: www.axcelis.com.