BILLERICA, Mass., July 14, 2015 (GLOBE NEWSWIRE) -- Entegris, Inc. (NASDAQ:ENTG), a leader in yield-enhancing materials and solutions announced today the release of Torrento® X Series 7 nm filters with FlowPlane™ linear filtration technology. FlowPlane is the semiconductor industry's first scalable, linear, high-flow filtration platform enabling advanced wet cleaning applications for the 10 nm node and beyond. The first in a series of filters based on the linear filtration technology, the FlowPlane S model is designed for point of dispense (POD) applications, enabling improvements in both on-wafer defectivity and yield for critical wet cleaning applications.
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"We've reached an inflection point where filter design must evolve to meet the needs of the most complex semiconductor manufacturing processes," said Entegris Vice-President of the Liquid Microcontamination Control business unit, Clint Haris. "A filter is the last line of defense to prevent defect-causing contaminants from reaching the wafer. Our smaller, more powerful filtration solution will enable our customers to effectively implement their 10 and 7 nm technology nodes."
Torrento X series 7 nm filters with FlowPlane linear filtration technology improve retention and increase flow rate performance by 100% compared to similarly sized radial filters. Moreover, FlowPlane users will benefit from the format's smaller device footprint as well as improved wafer defectivity performance.
For more information about the Torrento X Series 7 nm filters with FlowPlane linear filtration technology, go to www.entegris.com/flowplane.
About Entegris
Entegris is a leading provider of a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in the semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.
